- lithographic patterning
- микр. формирование рисунка методом литографии
The New English-Russian Dictionary of Radio-electronics. F.V Lisovsky . 2005.
lithographic patterning
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Patterning by etching at the nanoscale — (PENs) is a soft lithographic technique in which the bonds in the PDMS matrix are broken to controlably etch PDMS (ie dissolve) at a slow rate along the outside of a PDMS channel formed with a patterned PDMS stamp applied to a surface. The… … Wikipedia
Multiple patterning — is a class of technologies developed for photolithography to enhance the feature density. The simplest case of multiple patterning is double patterning, where a conventional lithography process is enhanced to produce double the expected number of … Wikipedia
Double patterning — is a class of technologies developed for photolithography to enhance the feature density. For the semiconductor industry, double patterning is the only lithography technique to be used for the 32 nm and 22 nm half pitch nodes in 2008 2009 and… … Wikipedia
Lithography — Charles Marion Russell s The Custer Fight (1903). Note the range of tones, fading toward the edges … Wikipedia
nanotechnology — /nan euh tek nol euh jee, nay neuh /, n. any technology on the scale of nanometers. [1987] * * * Manipulation of atoms, molecules, and materials to form structures on the scale of nanometres (billionths of a metre). These nanostructures typically … Universalium
45 nanometer — Per the [http://www.itrs.net/reports.html International Technology Roadmap for Semiconductors] , the 45 nm technology node should refer to the average half pitch of a memory cell manufactured at around the 2007 2008 time frame.Matsushita and… … Wikipedia
Interference lithography — (or holographic lithography) is a technique for patterning regular arrays of fine features, without the use of complex optical systems or photomasks. Basic principleThe basic principle is the same as in interferometry or holography. An… … Wikipedia
Depth of field — The area within the depth of field appears sharp, while the areas in front of and beyond the depth of field appear blurry … Wikipedia
National Institute of Standards and Technology — NIST redirects here. For other uses, see NIST (disambiguation). National Institute of Standards and Technology Agency overview Headquarters Gaithersburg, Maryland … Wikipedia
Patch antenna — A patch antenna is a popular antenna type, which gains its name from the fact that it basically consists of a metal patch suspended over a ground plane. The assembly is usually contained in a plastic radome, which protects the structure from… … Wikipedia
Salicide — The term salicide refers to a technology used in the microelectronics industry used to form electrical contacts between the semiconductor device and the supporting interconnect structure. The salicide process involves the reaction of a thin metal … Wikipedia
